SCIENTIFIC ORGANIZATION:
European Synchrotron Radiation Facility, 38043 Grenoble, France, Immanuel Kant Baltic Federal University, 236000 Kaliningrad, Russia, INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS of the Russian Academy of Sciences, 142432 Chernogolovka, Russia

REPORT FORM:
«Poster report»

AUTHOR(S)
OF THE REPORT:
P. Ershov, S. Kuznetsov, V. Yunkin, I. Snigireva1, A. Goikhman and A. Snigirev

TALKING POINTS:

Keywords: Refractive optics, X-ray high resolution diffraction, Reciprocal Space Mapping, Nano-structures

With increasing interest to nano- and micro- crystal structures, the precision methods and techniques of their observation and analyse are needed. One of the powerful instruments of studying such structures is an x-ray diffractometry.

We performed an x-ray reciprocal space mapping of the Si-Genano-heterostructure by using compound refractive lenses(CRL)[1] as a Fourier transformer[2](Pic. 1), providing a high angular resolution in two dimensions, which is crucial to characterize the periodic order and crystal structure of the Si-Genano – heterostructure (Pic.2).

The Si-Genano-heterostructure is 100 nm Genanocrystals on free-standing 90 nm wide and 150 nm high Silicon(100) pillars with a periodicity of 360 nm along the (110) crystal direction. These nano-heterostructures were realized on a Si (001) substrate using the CMOS gate spacer process in IHP laboratory Frankfurt (Oder), Germany.

The experiments were conducted at the ESRF ID06 beamline (Grenoble, France).

The obtained reciprocal space map provided the information about Si-Geheterostructure orientation, periodicity, crystal structure and stress distribution.

The advantages of the used technique are:

- Possibility to perform time resolved experiments (like surface acoustic waves)[3]

- The high resolution in reciprocal space (~1 urad)